EBS Tungsten EM Filaments

The tungsten filaments manufactured by Energy Beam Sciences are used in all major brands of scanning and transmission electron microscopes. These high quality, high stability tungsten EM filaments, also called cathodes or electron emitters, are manufactured to excede the specifications of the original equipment manufacturers.  These superior cathodes are made using high quality ceramic dics, exact size contact pins and high grade tungsten filament wire. Special tools are used to produce the correct shape of the tungsten filament. All EBSciences tungsten filaments are precisely aligned and annealed in high vacuum to reduce stress in the filament. This will guarantee optimum stability, maximum brightness, longer lifetime and overall lower running costs.

Exclusive features of the EBS tungsten EM filaments are:

  • Minimum tip radius for coherent beam
  • Rigid attachment of filament wire to post to increase stability
  • Fully stress relieved for enhanced cathode lifetime
  • Polished post ends
  • Precise dimensions
  • Better long term economy

Please consult the following table for the correct type of tungsten filament for your SEM, TEM or Microprobe. The EBS tungsten filaments are available for FEI, Hitachi, ISI, JEOL, Philips, Tescan, Zeiss, LEO, Cambridge Instruments, Leica, AmRay, Pemtron and CamScan Electron Microscopes.

AEI base Filaments compatible with Zeiss EVO, LEO, Leica, and Cambridge Instrument SEMs
Product # Unit
AmRay Filament for all AmRay, AMR and Leitz/AMR SEMs, except AMR 1200 series
Product # Unit
14-AM1202 box/10
Coxem Filaments H1020 for Coxem SEMs
Product # Unit
14-CX1212 box/10
FEI / Philips Filaments for FEI SEM/TEM and Philips PSEM 500 and later and Philips EM200 TEM and later
Product # Unit
Hitachi S-Type Filaments for S-, SU-, H- and X-Series SEM and TEM
Product # Unit
14-HI1204 box/10
Hitachi S-Type pre-aligned Filaments with Metal Cartridge for S-3400N, S-3700N, SU-1500, SU-15210, SU-3500 and TM33030-3000-1000 series Table top SEM
Product # Unit
14-HI1205 box/10
14-HT1205-1 each
ISI 2-Pin Filaments for ISI / ABT / Topcon SEM and ABT TEM
Product # Unit
14-I21206 box/10
JEOL K-Type Filaments with Stainless Steel Alignment Ring for SEM and TEM
Product # Unit
14-JL1208 box/6
Pemtron Filaments for Pemtron SEMs
Product # Unit
14-PT1211 box/10
Tescan Filaments for Tescan SEMs and Camscan SEMs with new Tescan Columns
Product # Unit
14-TN1209 box/10
14-TN1209-3 box/3
ZEISS Tungsten Filaments for Zeiss SEMs and TEMs
Product # Unit
MSFILWZ-10 box/10

Electron Source Performance Table

The electron source performance table is provided to give additional information regarding the performance and requirements for different type of electron emitters. Tungsten cathodes are still used in the majority in SEMs and in general use TEMs. Improved results can be obtained with LaB6 cathodes, whereas the highest resolution can be obtained with either Schottky or cold Field Emission Sources which can only be used in suitable EMs.

Emitter TypeThermionicThermionicSchottky FECold FE
Cathode MaterialWLaB6ZrO/W (100)W (310)
Operating Temp (K)270018001800300
Cathode Radius (nm)60,00010,000<1000<100
Effective Source Radius (µm)25100.0150.0025
Emission Current Density (A/cm2)330530017,000
Total Emission Current (µA)200802005
Brightness (A/cm2.sr.kV)1×1041×1051×1072×107
Maximum Probe Current (nA)10001000100.2
Energy Spread @ Cathode (ev)0.590.40.310.26
Energy Spread @ Source Exit (eV)1.5 – 2.51.3 – 2.50.35 – 0.70.3 – 0.7
Beam Noise (%)1115 – 10
Emission Current Drift (%/h)0.10.2<0.55
Operating Vacuum (hPa/mbar)<10-5<10-6<10-8<10-10
Typical Cathode Life (h)100>1000>5000>2000
Cathode Regeneration (h)NoneNoneNone6-12
Sensitivity to External InfluencesMinimalLowLowHigh

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