EM-Tec MCS series magnification calibration standards

The EM-Tec MCS series magnification calibration standards are unique, cost effective, wide range SEM calibration standards. These fullly featured practical calibration standards can be used for magnification calibration or critical dimension measurements in table top SEM, standard SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems.

Two types of calibration ranges for the Em-Tec MCS calibration standards are offered, both standard with certificates traceability or optionally with an individual certificate of calibration:

  • EM-Tec MCS-1 with a scale ranging from 2.5mm to 1µm; ideal for table top and compact SEMs, covers 10x to 20,000x magnifications.
  • EM-Tec MCS-0.1 with a scale ranging from 2.5mm down to 100nm; ideal for SEM, FESEM and FIB systems, covers 10x to 200,000 magnifications.

The features on the EM-Tec MCS series are made using state of the art MEMS manufacturing techniques with high contrast chromium deposited lines for for the larger features and gold over chromium for the smaller features below 2.5µm The gold deposited ensure optimum signal to noise ratio for calibration purposes. Advantages of the EM-Tec MCS series are:

  • unprecedented precision over the full calibration range
  • all features in one single ultraflat plane
  • metal on silicon with excellent signal to noise ratio
  • wider range of features to accurately calibrate low, medium and high magnification ranges
  • compatible with both SE and BSE imaging
  • fully conductive materials
  • easy to convert feature sizes
  • can be cleaned with plasma cleaning
  • all NIST traceable or optionally certified

The EM-Tec MCS-0.1 calibration standard is an excellent replacement for the discontinued SIRA calibration standard (which was using only 0.51 and 0.463µm features) with added advantages. Compatible feature sizes for the SIRA standard are 50µm (5×10µm) and 0.5µm (500nm).

#31-T31000 EM-Tec MCS-1TR traceable magnification calibration standard, 2.5mm to 1µm

The EM-Tec MCS-1 calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm.
The 31-T31000 EM-Tec MCS-1TR is traceable on the wafer level against a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.

EM-Tec MCS-1TR traceable magnification calibration standard, 2.5mm to 1µm
Product # Unit
31-T31000-U unmounted
31-T31000-1 mounted on standard 12.7mm pin stub
31-T31000-2 mounted on Zeiss 12.7mm pin stub
31-T31000-6 mounted on 12.2mm JEOL stub
31-T31000-8 mounted on 15mm Hitachi stub
31-T31000-10 mounted on custom stub

#31-C31000 EM-Tec MCS-1CF certified magnification calibration standard, 2.5mm to 1µm

The EM-Tec MCS-1 calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm.
The 31-C31000 EM-Tec MCS-1CF is individually certified utilizing a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.

EM-Tec MCS-1CF certified magnification calibration standard, 2.5mm to 1µm
Product # Unit
31-C31000-Uunmounted
31-C31000-1 mounted on standard 12.7mm pin stub
31-C31000-2 mounted on Zeiss 12.7mm pin stub
31-C31000-6 mounted on 12.2mm JEOL stub
31-C31000-8 mounted on 15mm Hitachi stub
31-C31000-10 mounted on custom stub

#31-T32000 EM-Tec MCS-0.1TR traceable magnification calibration standard, 2.5mm to 100nm

The EM-Tec MCS-0.1 calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The 31-T32000 EM-Tec MCS-0.1TR is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Good alternative for the discontinued SIRA calibration standard.

EM-Tec MCS-0.1TR traceable magnification calibration standard, 2.5mm to 100nm
Product # Unit
31-T32000-U unmounted
31-T32000-1 mounted on standard 12.7mm pin stub
31-T32000-2 mounted on Zeiss 12.7mm pin stub
31-T32000-6 mounted on 12.2mm JEOL stub
31-T32000-8 mounted on 15mm Hitachi stub
31-T32000-10 mounted on custom stub

#31-C32000 EM-Tec MCS-0.1CF certified magnification calibration standard, 2.5mm to 100nm

The EM-Tec MCS-0.1 calibration standard has been developed to most accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Brigth chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The 31-C32000 EM-Tec MCS-0.1CF is individually certified utilizing a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes.

EM-Tec MCS-0.1CF certified magnification calibration standard, 2.5mm to 100nm
Product # Unit
31-C32000-U unmounted
31-C32000-1 mounted on standard 12.7mm pin stub
31-C32000-2 mounted on Zeiss 12.7mm pin stub
31-C32000-6 mounted on 12.2mm JEOL stub
31-C32000-8 mounted on 15mm Hitachi stub
31-C32000-10 mounted on custom stub

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