Magnification | x20 ~ x100.000 |
Acceleration Voltage | 1kV~30kV |
Electron Gun | Tungsten Filament (W) |
Detector | SE |
BSE Detector | Solid type 4 Channel |
Stage | X: 35mm Y: 35mm Z: 0-60mm |
T | 0 to 45° R: 360° |
Vacuum System | Rotary Pump, Turbo |
OS | Windows 7 |
Operation | Mouse, Keyboard |
Dimension | 400(W) x 600(L) x 500(H)mm |
Molecular Pump | Less than 3min |
Options
Low vacuum, tensile stage, EDS, 3D reconstruction