The new and innovative Micro-Tec MTC-5 multiple target graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Chromium lines. The precise patterns are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec multi target graticules provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging, optical quality control systems and low magnification SEM imaging for:
- magnification calibration
- critical dimension measurements
- distortion correction
- imaging quality assessment
- quality control measurements.
There are four distinct patterns on the MTC-5 calibration standard:
- Circle patterns from 5µm to 5mm diameter
- Square patterns from 5 x 5µm to 5x5mm
- Hexagon patterns from 5µm to 5mm across
- Cross scale pattern of 5x5mm with 0.002mm divisions
The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.
Each of the calibration standards has a unique product ID serial number etched on the die. The Micro-Tec MTC-5 calibration standards are NIST traceable; a wafer level certificate of traceability is supplied with each standard. The MTC-5 is available in two versions:
- MTC-5 with Cr lines on silicon for bright field imaging
- MTCD-5 with inverted pattern (area between line coated with Cr) for dark field imaging with smallest feature 10µm
#31-T33600 Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, Bright Field
The Micro-Tec MTC-5F brigth field multiple target calibration standard comprises accurately deposited bright chromium lines on a conductive ultra-flat silicon substrate. The MTC-5F has been designed for calibrating reflective ligth microscopes, stereo microscopes, optical quality control systems and low magnification SEM imaging. The Micro-Tec MTC-5F incorporates four distinct patterns:
Circle patterns from 5µm to 5mm diameter
Square patterns from 5×5µm to 5x5mm
Hexagon patterns from 5µm to 5mm across
Cross scale patterns of 5x5mm with 0.002mm divisions
The four chromium deposited patterns all in the same focus plane and provide a more superior signal compared to etched patterns. The Micro-Tec MTC-5F is a NIST traceable standard.
 | Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, Bright Field |
|---|---|
| Product # | Unit |
| 31-T33600-U | unmounted |
| 31-T33600-3 | mounted on 25.4mm pin stub |
| 31-T33600-7 | mounted op 25mm JEOL stub |
| 31-T33600-9 | mounted on 25mm Hitachi stub |
| 31-T33600-11 | mounted on black microscope slide |
| 31-T33600-10 | mounted on custom specimen stub |
#31-T33700 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, Dark Field
The MTCD-5 dark field multiple target calibration standard comprised four inverted patterns; chromium deposited area with features left undeposited showing the silicon substrate. Designed for dark field applications in reflected light microscopy, optical quality control systems and low magnification SEM imaging. The large chromium coated are can also be used to assess the ability of optical systems to distinguish features in high brightness and high reflection applications. Patterns are:
Inverted circle patterns from 10µm to 5mm diameter
Inverted square patterns from 10×10µm to 5x5mm
Inverted hexagon patterns from 10µm to 5mm across
Inverted cross scale patterns of 5x5mm with 0.01mm divisions.
The Micro-Tec MTCD-5 is a NIST traceable standard.
 | Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, Dark Field |
|---|---|
| Product # | Unit |
| 31-T33700-U | unmounted |
| 31-T33700-3 | mounted on 25.4mm pin stub |
| 31-T33700-7 | mounted op 25mm JEOL stub |
| 31-T33700-9 | mounted on 25mm Hitachi stub |
| 31-T33700-11 | mounted on black microscope slide |
| 31-T33700-10 | mounted on custom specimen stub |
