APT – Atom Probe Tomography
Atom Probe Tomography (APT or 3D Atom Probe) is the only material analysis technique offering extensive capabilities for both 3D imaging and chemical composition measurements at the atomic scale (around 0.1-0.3nm resolution in depth and 0.3-0.5nm laterally). Since its early developments, Atom Probe Tomography has contributed to major advances in materials science. The sample is […]
SIMS – KLEORA
The Specialized Ion Microprobe for World-leading Research in Geochronology In order to meet a growing demand from geochronologists, CAMECA has introduced KLEORA, a large geometry SIMS instrument fully optimized for advanced U-Th-Pb mineral dating. Based on the new generation ultra-high sensitivity large geometry IMS 1300-HR³ ion microprobe, KLEORA provides benchmark sensitivity for in-situ U-Th-Pb isotopic analyses in […]
APT – EIKOS
The Atom Probe allowing routine, high-performance 3D nanoanalysis both for research and industry. Built on 30 years of success in Atom Probe Tomography instrumentation and applications, CAMECA has developed EIKOS ™, the Atom Probe microscope for the agile development of alloys and the materials research at the nanoscale. EIKOS atomic probe offers: 3D tomography […]
APT – LEAP 5000
3D Atom Probe Microscope with unmatched 3D sub-nanometer analytical performance The LEAP 5000 is CAMECA’s cutting-edge atom probe microscope, offering superior detection efficiency across a wide variety of metals, semiconductors and insulators: more than 40% extra atoms detected per nm3 analyzed. The LEAP 5000 collects nanoscale information from a microscale dataset in just a few hours and delivers […]
LEXES – EX 300
Front-end semiconductor compositional metrology solution for 22nm node and beyond. CAMECA’s EX-300 is a unique LEXES based metrology tool supporting major semiconductor developments since the 90nm node era and following up the integration of the most diverse materials. It accelerates the time-to-market of your logic and memory devices and increases the integrated yield of your high volume […]
EPMA – SKAPHIA
Shielded Electron Probe MicroAnalyzer for Radioactive Samples SKAPHIA provides a safe environment for manipulating and analyzing nuclear samples together with benchmark analytical performance allowing scientists to gain a deeper understanding of fuel performance, to explore irradiated material behavior and radiation damage processes, to develop innovative alloys and structural materials, to optimize the nuclear fuel cycle […]
EPMA – SXFive-TACTIS
The Electron Microprobe that brings EPMA to your fingertips Since pioneering Electron Probe MicroAnalysis in the 1950’s CAMECA has released several generations of microprobes, all with a proven valuable track record for analytical performance and reliability. The new SXFive-TACTIS builds on this legacy to deliver enhanced imaging and quantitative analysis performance in a user-friendly environment. […]
EMPA – SXFiveFE
Field Emission EPMA for High Resolution Quantitative Analysis and X-Ray Mapping The SXFiveFE is CAMECA’s fifth generation electron probe microanalyzer offering the unique combination of a field emission electron column with industry-leading high-sensitivity spectrometers. It enables high accuracy quantitative chemical microanalysis and x-ray mapping at the highest possible spatial resolution in mineralogy, geochronology, metallurgy and […]
EPMA – SXFive
Electron Probe Micro Analyzer for Materials & Geoscience Combining advanced electron optics, state-of-the-art spectrometer design and dedicated software, the SXFive performs high accuracy qualitative and quantitative chemical microanalysis in geochemistry, mineralogy, geochronology, physical and nuclear metallurgy, material sciences (including cements, glass, ceramics …), biochemistry as well as microelectronics. Optimized electron columnThe SXFive comes equipped with […]
SIMS – shielded SIMS
High Performance SIMS Instrument for the Analysis of Radioactive Samples The IMS 7fR is a shielded magnetic sector SIMS instrument specifically developed for the analysis of radioactive materials. Derived from the IMS xf series, it offers all necessary protections against radiation and alpha contamination during sample transfer and analysis while ensuring benchmark SIMS analytical performance: […]
SIMS – SIMS 4550
Quadrupole SIMS Dopant Depth Profiling and Thin Layer Analysis in Semiconductors The CAMECA SIMS 4550 offers extended capabilities for ultra shallow depth profiling, trace element and composition measurements of thin layers in Si, high-k, SiGe and other compound materials such as III-V for optical devices. High depth resolution and high throughputWith ever shrinking device dimensions, […]
SIMS – IMS Wf & SC Ultra
High Performance Low Energy SIMS for Advanced Semiconductor Applications The IMS Wf and SC Ultra have been specifically designed to meet the increasing needs for dynamic SIMS measurements in advanced semiconductors. Offering a large range of impact energies (100 eV to 10 keV) with no compromise on mass resolution and primary beam density, they ensure […]
SIMS – NanoSIMS 50 L
SIMS Microprobe for Isotopic and Trace Element Analysis at High Spatial Resolution The NanoSIMS 50L is a unique ion microprobe optimizing SIMS analysis performance at high lateral resolution. It is based on a coaxial optical design of the ion beam and the secondary ion extraction, and on an original magnetic sector mass analyzer with multicollection. […]
SIMS – KLEORA
The Specialized Ion Microprobe for World-leading Research in Geochronology In order to meet a growing demand from geochronologists, CAMECA has introduced KLEORA, a large geometry SIMS instrument fully optimized for advanced U-Th-Pb mineral dating. Based on the new generation ultra-high sensitivity large geometry IMS 1300-HR³ ion microprobe, KLEORA provides benchmark sensitivity for in-situ U-Th-Pb isotopic analyses in […]
SIMS – IMS 1300-HR³
Large Geometry Ion Microprobe for Geosciences The IMS 1300-HR³ is a large geometry ion microprobe delivering unequalled analytical performance for a wide range of geoscience applications: tracking geological processes using stable isotopes, dating minerals, determining the presence and distribution of trace elements. Its high sensitivity and high lateral resolution also make it the tool of […]
SIMS – IMS 7f-GEO
Compact, High Throughput SIMS for Geoscience Laboratories The IMS 7f-GEO is a mono-collection SIMS model specifically designed to perform high precision / high throughput measurements in geological samples, i.e. stable isotopes, REE (Rare Earth Elements), trace elements… It is also used for material sciences analyses and environmental studies. A unique detection system for high isotope […]
SIMS – IMS 7f-Auto
Versatile SIMS Tool: Reference Detection Sensitivity with High Throughput & Full Automation The IMS 7f-Auto is the latest version of our successful IMS xf Secondary Ion Mass Spectrometer (SIMS) product line. Designed to deliver high precision elemental and isotopic analyses with increased ease-of-use and productivity, it has been optimized for challenging applications such as glass, […]
LEXES
Low energy Electron induced X-ray Emission Spectrometry (LEXES) consists in irradiating a solid sample by a low energy electron beam and analyzing the soft X-rays emitted by the target. Because the X-rays are characteristic of the emitting elements, selective elemental analysis is achieved. The analyzed depth can be varied between 1 to 700 nanometers, depending […]
EPMA – Electronic microanalysis
EPMA works by bombarding a micro-volume of a sample with a focused electron beam (typical energy = 5-30 keV) and collecting the X-ray photons thereby emitted by the various elemental species. Because the wavelengths of these X-rays are characteristic of the emitting species, the sample composition can be easily identified by recording WDS spectra (Wavelength […]
SIMS – secondary ion mass spectrometry
The SIMS technique offers a unique combination of extremely high sensitivity for all elements, from hydrogen to uranium and beyond, with a minimum detection limit in the order of ppb for many elements. Additionally, it can reach high lateral resolution, down to 40nm, and a very low background allowing for a high dynamic range. When […]