Dettagli
Features
- Cleanroom Material Fabricated Static Free Design
- Bright LCD Touchscreen Control
- Default “Automode” setting suitable for most wafer and die MEMS applications
- Process up to 5 substrates per process run (either Wafers or Die)
- HF Compatible Holder(s) included with system (see Chamber Size Options below)
- Create and save custom Recipes exactly for your specific sample needs
- Easy View Placement of Micro Metering Valves with Vernier Handles
- Slow Fill feature protects the most delicate samples
- Fast adiabatic chamber cooling (Less than one minute for the 1.25″ chamber)
- Maintenance Free Non-Mechanical Vortex Swirl™ Purge Stirring
- External 0.5µm Post-Purge filter access for easy preventive maintenance
- External LCO2 tank supply particulate filtration using ‘Double T-Filter’ design with 99.5%+ retention
- Internal filtration delivers filtered LCO2 down to 0.08µm with 99.999+% retention directly into process chamber
- Internal SOTER™ Condenser quietly separates waste alcohol and CO2 while eliminating any freeze up or static discharge
- EZ top loading process chamber with LED illumination
- “Stasis Software” for drying GELS and other challenging sample types
- Post Process Previous Run Data Review
- All components meet CE, UL and/or U.S. Military specifications
- 2 year warranty on all parts and labor
- Made in U.S.A.
Scheda Tecnica
Specifications
- Cabinet: (W) 15.0″ (38.0cm) x (H) 13.25″ (33.5cm) x (D) 20″ (50.8cm)
- System Set-Up Area Required: (W) 24″ (61cm) x (D) 22″ (56cm)
- Chamber Size (Available in three sizes):
- 1.25″ ID x 1.25″ Depth (31.75mm ID x 31.75mm Depth) – 25 ml Volume
- 2.50″ ID x 1.25″ Depth (63.50mm ID x 31.75mm Depth) – 100 ml Volume
- 3.40″ ID x 1.25″ Depth (86.36mm ID x 31.75mm Depth) – 186 ml Volume
- Pressure Gauge Range: 0- 2000 psi, Temperature Range – 30°C to 60°C
- 120V or 220V Models Available
Standard accessories
- Flexible High-Pressure LCO2 Supply Hose, 10ft (3.0m)
Note: Other lengths available upon request up to 50ft (15m)
- HF Compatible Substrate Holders included (see Chamber Size Options below)
- Chamber insert included for 2.50″ chamber and 3.40″ chamber to reduce the chamber size down to 1.25″
- Double T-Filter Assembly (#8785) pre-installed onto the LCO2 high-pressure hose. LCO2 filtered twice thru 0.5µm filters prior to LCO2 entering Autoamdri®-931 process chamber
- Static Free Exhaust Tubing
- Flow Meter supplied allows precise BLEED Exhaust Calibration
- Spare chamber O-rings (2), LED chamber lamp (1), and 5A slo-blow fuses (2)
- User Manual and Check-Out Data Sheet
- Installation Tool Kit
- Free lifetime technical support
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